JPH0151543B2 - - Google Patents

Info

Publication number
JPH0151543B2
JPH0151543B2 JP54019835A JP1983579A JPH0151543B2 JP H0151543 B2 JPH0151543 B2 JP H0151543B2 JP 54019835 A JP54019835 A JP 54019835A JP 1983579 A JP1983579 A JP 1983579A JP H0151543 B2 JPH0151543 B2 JP H0151543B2
Authority
JP
Japan
Prior art keywords
bellows
shaft
vacuum
space
container
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP54019835A
Other languages
English (en)
Japanese (ja)
Other versions
JPS55113873A (en
Inventor
Masayuki Shimizu
Kyoshi Yoshida
Seiichi Yamada
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Priority to JP1983579A priority Critical patent/JPS55113873A/ja
Publication of JPS55113873A publication Critical patent/JPS55113873A/ja
Publication of JPH0151543B2 publication Critical patent/JPH0151543B2/ja
Granted legal-status Critical Current

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/56—Apparatus specially adapted for continuous coating; Arrangements for maintaining the vacuum, e.g. vacuum locks
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating

Landscapes

  • Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • General Chemical & Material Sciences (AREA)
  • Sealing Devices (AREA)
  • Diaphragms And Bellows (AREA)
  • Physical Vapour Deposition (AREA)
JP1983579A 1979-02-23 1979-02-23 Low pressure device Granted JPS55113873A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1983579A JPS55113873A (en) 1979-02-23 1979-02-23 Low pressure device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1983579A JPS55113873A (en) 1979-02-23 1979-02-23 Low pressure device

Publications (2)

Publication Number Publication Date
JPS55113873A JPS55113873A (en) 1980-09-02
JPH0151543B2 true JPH0151543B2 (en]) 1989-11-06

Family

ID=12010326

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1983579A Granted JPS55113873A (en) 1979-02-23 1979-02-23 Low pressure device

Country Status (1)

Country Link
JP (1) JPS55113873A (en])

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS62163369U (en]) * 1986-03-31 1987-10-17
JPH0749082B2 (ja) * 1986-09-22 1995-05-31 住友化学工業株式会社 区画壁を貫通する円筒対偶軸部の軸封構造
JPH0250568U (en]) * 1988-10-04 1990-04-09
JP2733780B2 (ja) * 1989-02-08 1998-03-30 日本真空技術株式会社 密封処理装置におけるロッドシール

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5035250U (en]) * 1973-07-24 1975-04-15

Also Published As

Publication number Publication date
JPS55113873A (en) 1980-09-02

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